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Si+ ion beam mixing of tin layers on crystalline silicon

G. Massouras J.A. Roger Laurence Romana 1 G. Fuchs
1 UA - Université des Antilles
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Journal articles
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https://hal.univ-antilles.fr/hal-01685827
Contributor : Ua Bibliothèque Universitaire <>
Submitted on : Tuesday, January 16, 2018 - 5:15:28 PM
Last modification on : Wednesday, March 11, 2020 - 4:40:02 PM

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G. Massouras, J.A. Roger, Laurence Romana, G. Fuchs. Si+ ion beam mixing of tin layers on crystalline silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 1989, 36 (2), pp.148 - 152. ⟨10.1016/0168-583X(89)90576-4⟩. ⟨hal-01685827⟩

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